Service Hotline:400-9988-118

锐峰先科技术有限公司

BE FIRST TECHNOLOGY CO., LTD

UV lithography equipment


We provide Projection Scanner and Mask Alignment products, suitable for advanced packaging on 300mm and 200mm wafers. If you need to know the detailed parameters of the products, please contact our personnel for further communication.

 

The Projection Scanner deliver a unique projection lithography solution for advanced wafer processing. Combining full-field UV exposure with single continuous scanning, they ensure uniform results without stitching or over-exposure defects. Designed for high throughput and non-contact operation, our systems enable cost-efficient, high-resolution lithography across diverse applications in semiconductors, MEMS, and advanced packaging.

 

The Mask Aligners combine superior alignment accuracy with advanced exposure optics to meet the toughest lithography challenges. Designed for substrates up to 300 mm, they deliver stable overlay, high yield, and reliable results across diverse applications for any scale – from R&D to high-volume manufacturing.