TESCAN SEM/FIB-SEM integrated Raman integrated microscope

Combining Raman imaging and scanning electron microscopy for comprehensive analysis of samples is a novel combined electron microscopy technique. By combining Raman analysis and scanning electron microscopy, the subtle structural features on the surface of the material can be combined with the molecular information of the compound.

The combination of Raman spectroscopy and scanning electron microscopy imaging extends the analytical performance of scanning electron microscopy. Raman imaging is a well-known spectroscopic technique used to obtain the chemical composition and molecular spatial distribution of samples. It can also be used to obtain 2D and 3D images, as well as depth oriented contours, to analyze the distribution of mixtures within materials. Raman spectroscopy is not only suitable for phase identification, but also for studying the valence states of materials. Some Raman shifts are generated by the stress acting on the material, from which the stress intensity can be observed and measured. The crystallinity of solid materials can also be evaluated by the width of Raman peaks. By analyzing the intensity of Raman peaks, people can also obtain deeper information. The intensity of Raman peaks is related to the total amount of material and also to the thickness of specific layers in layered materials. Therefore, this technology can also be used to distinguish between single-layer, double-layer, or multi-layer graphite regions.

• Integrated software interface, providing users with a user-friendly measurement operation experience
• The measurement results have strong correlation and the images can be overlaid
• Ensure that the original performance of scanning electron microscopy and Raman imaging is not affected
• Raman microscopy is used to analyze the composition and material properties (stress, orientation, crystallinity) of mixtures
• Raman spectroscopy is a supplementary analytical tool for EDS